Invention Grant
- Patent Title: Measuring apparatus, drawing apparatus, and article manufacturing method
- Patent Title (中): 测量装置,绘图装置和制品制造方法
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Application No.: US13547390Application Date: 2012-07-12
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Publication No.: US08927949B2Publication Date: 2015-01-06
- Inventor: Shigeki Ogawa
- Applicant: Shigeki Ogawa
- Applicant Address: JP
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2011-154766 20110713
- Main IPC: G21K5/02
- IPC: G21K5/02 ; G03F7/20 ; H01J37/244

Abstract:
The beam measuring apparatus of the present invention includes a detection device including a shield member that has an edge, and a detector configured to detect the beam of which at least a part is not shielded by the shield member; a relative movement mechanism configured to cause a relative movement between the shield member and the beam; and a controller configured to control the detection device and the relative movement mechanism so as to cause one of the edge and the beam to traverse the other with respect to each of a plurality of points on the edge, to sum a plurality of signals, respectively obtained by the detection device with respect to the plurality of points and with respect to relative positions of the relative movement corresponding to one another, so as to obtain a signal sequence, and to obtain the characteristic based on the signal sequence.
Public/Granted literature
- US20130017476A1 MEASURING APPARATUS, DRAWING APPARATUS, AND ARTICLE MANUFACTURING METHOD Public/Granted day:2013-01-17
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