Invention Grant
- Patent Title: Dynamic random access memory unit and method for fabricating the same
- Patent Title (中): 动态随机存取存储单元及其制造方法
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Application No.: US13703722Application Date: 2012-10-18
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Publication No.: US08927966B2Publication Date: 2015-01-06
- Inventor: Libin Liu , Renrong Liang , Jing Wang , Jun Xu
- Applicant: Tsinghua University
- Applicant Address: CN
- Assignee: Tsinghua University
- Current Assignee: Tsinghua University
- Current Assignee Address: CN
- Agency: Lerner, David, Littenberg, Krumholz & Mentlik, LLP
- Priority: CN201210161248 20120522; CN201210161290 20120522
- International Application: PCT/CN2012/083158 WO 20121018
- International Announcement: WO2013/174094 WO 20131128
- Main IPC: H01L31/00
- IPC: H01L31/00 ; H01L29/78 ; H01L29/66 ; H01L27/108 ; H01L21/84 ; H01L29/775 ; H01L27/12

Abstract:
A dynamic random access memory unit and a method for fabricating the same are provided. The dynamic random access memory unit comprises: a substrate; an insulating buried layer formed on the substrate; a body region formed on the insulating buried layer and used as a charge storing region; two isolation regions formed on the body region, in which a semiconductor contact region is formed between the isolation regions and is a charge channel; a source, a drain and a channel region formed on the isolation regions and the semiconductor contact region respectively and constituting a transistor operating region which is partially separated from the charge storing region by the isolation regions and connected with the charge storing region via the charge channel; a gate dielectric layer formed on the transistor operating region, a gate formed on the gate dielectric layer; a source metal contact layer, a drain metal contact layer.
Public/Granted literature
- US20140054546A1 Dynamic Random Access Memory Unit And Method For Fabricating The Same Public/Granted day:2014-02-27
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