Invention Grant
- Patent Title: Solid-state imaging device and manufacturing method therefor
- Patent Title (中): 固态成像装置及其制造方法
-
Application No.: US13807065Application Date: 2011-06-21
-
Publication No.: US08928041B2Publication Date: 2015-01-06
- Inventor: Mineo Shimotsusa , Fumihiro Inui
- Applicant: Mineo Shimotsusa , Fumihiro Inui
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon USA, Inc. IP Division
- Priority: JP2010-149476 20100630
- International Application: PCT/JP2011/003530 WO 20110621
- International Announcement: WO2012/001910 WO 20120105
- Main IPC: H01L27/148
- IPC: H01L27/148 ; H01L27/146

Abstract:
A solid-state imaging device includes a first and second pixel regions. In the first pixel region, a photoelectric conversion unit, a floating diffusion region (FD), and a transferring transistor are provided. In the second pixel region, an amplifying transistor, and a resetting transistor are provided. A first element isolation portion is provided in the first pixel region, while a second element isolation portion is provided in the second pixel region. An amount of protrusion of an insulating film into a semiconductor substrate in the first element isolation portion is smaller, than that in the second element isolation portion.
Public/Granted literature
- US20130099291A1 SOLID-STATE IMAGING DEVICE AND MANUFACTURING METHOD THEREFOR Public/Granted day:2013-04-25
Information query
IPC分类: