Invention Grant
US08928048B2 Methods of forming semiconductor device with self-aligned contact elements and the resulting device
有权
用自对准接触元件形成半导体器件的方法和所得到的器件
- Patent Title: Methods of forming semiconductor device with self-aligned contact elements and the resulting device
- Patent Title (中): 用自对准接触元件形成半导体器件的方法和所得到的器件
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Application No.: US13743454Application Date: 2013-01-17
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Publication No.: US08928048B2Publication Date: 2015-01-06
- Inventor: Ruilong Xie , Xiuyu Cai
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L21/336 ; H01L21/02 ; H01L29/78

Abstract:
One method disclosed includes forming a final gate structure in a gate cavity that is laterally defined by sidewall spacers, removing a portion of the sidewall spacers to define recessed sidewall spacers, removing a portion of the final gate structure to define a recessed final gate structure and forming an etch stop on the recessed sidewall spacers and the recessed final gate structure. A transistor device disclosed herein includes a final gate structure that has an upper surface positioned at a first height level above a surface of a substrate, sidewall spacers positioned adjacent the final gate structure, the sidewall spacers having an upper surface that is positioned at a second, greater height level above the substrate, an etch stop layer formed on the upper surfaces of the sidewall spacers and the final gate structure, and a conductive contact that is conductively coupled to a contact region of the transistor.
Public/Granted literature
- US20140197468A1 METHODS OF FORMING SEMICONDUCTOR DEVICE WITH SELF-ALIGNED CONTACT ELEMENTS AND THE RESULTING DEVICE Public/Granted day:2014-07-17
Information query
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