Invention Grant
US08928229B2 Pulse mode capability for operation of an RF/VHF impedance matching network with a 4 quadrant, VRMS/IRMS responding detector circuitry
有权
具有4象限,VRMS / IRMS响应检测器电路的RF / VHF阻抗匹配网络的脉冲模式能力
- Patent Title: Pulse mode capability for operation of an RF/VHF impedance matching network with a 4 quadrant, VRMS/IRMS responding detector circuitry
- Patent Title (中): 具有4象限,VRMS / IRMS响应检测器电路的RF / VHF阻抗匹配网络的脉冲模式能力
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Application No.: US14314212Application Date: 2014-06-25
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Publication No.: US08928229B2Publication Date: 2015-01-06
- Inventor: Gerald E. Boston
- Applicant: Gerald E. Boston
- Applicant Address: US CA San Jose
- Assignee: COMET Technologies, USA, Inc.
- Current Assignee: COMET Technologies, USA, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Edmonds & Nolte, PC
- Main IPC: G05F3/00
- IPC: G05F3/00 ; H01J37/32

Abstract:
A physical vapor deposition system may include an RF generator configured to supply a pulsing AC process signal to a target in a physical vapor deposition chamber via the RF matching network. A detector circuit may be coupled to the RF generator and configured to sense the pulsing AC process signal and to produce a corresponding pulsing AC voltage magnitude signal and pulsing AC current magnitude signal. An envelope circuit may be electrically coupled to the detector circuit and configured to receive the pulsing AC voltage and current magnitude signals and to produce a DC voltage envelope signal and a DC current envelope signal. A controller may be electrically coupled to the envelope circuit and the RF matching network and configured to receive the DC voltage and current envelope signals and to vary an impedance of the RF matching network in response to the DC voltage and current envelope signals.
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