Invention Grant
US08928432B2 Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic apparatus 有权
表面声波谐振器,表面声波振荡器和电子设备

Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic apparatus
Abstract:
A surface acoustic wave resonator includes: an IDT which is disposed on a quartz substrate with Euler angles of (−1°≦φ≦1°, 117°≦θ≦142°, 42.79°≦|ψ|≦49.57°), which is made of Al or alloy including Al as a main component and which excites a surface acoustic wave in an upper mode of a stop band; and an inter-electrode-finger groove which is formed by recessing the quartz substrate between electrode fingers which form the IDT. Here, the following expression is satisfied: 0.01λ≦G  (1), where λ represents a wavelength of the surface acoustic wave and G represents a depth of the inter-electrode-finger groove. The depth G of the inter-electrode-finger groove and a line occupancy η of the IDT satisfy the following expression: - 2.5 × G λ + 0.675 ≦ η ≦ - 2.5 × G λ + 0.775 ( 5 ) and a number of pairs N of the electrode fingers in the IDT is in the range of the following expression: 160≦N≦220  (19).
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