Invention Grant
US08928874B2 Method for identifying abnormal spectral profiles measured by a chromatic confocal range sensor
有权
用于识别由色共焦范围传感器测量的异常光谱分布的方法
- Patent Title: Method for identifying abnormal spectral profiles measured by a chromatic confocal range sensor
- Patent Title (中): 用于识别由色共焦范围传感器测量的异常光谱分布的方法
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Application No.: US13405214Application Date: 2012-02-24
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Publication No.: US08928874B2Publication Date: 2015-01-06
- Inventor: Andrew Michael Patzwald
- Applicant: Andrew Michael Patzwald
- Applicant Address: JP Kawasaki-shi
- Assignee: Mitutoyo Corporation
- Current Assignee: Mitutoyo Corporation
- Current Assignee Address: JP Kawasaki-shi
- Agency: Christensen O'Connor Johnson Kindness PLLC
- Main IPC: G01J3/00
- IPC: G01J3/00 ; G01C3/00 ; G01C5/00 ; G01C3/08 ; G01B11/30 ; G01B11/24

Abstract:
A method for operating a chromatic range sensor (CRS) system to identify abnormal spectral profiles arising from light reflected from more than one portion of a workpiece surface is provided. The method comprises: providing a CRS system comprising: an optical element, a light source, and CRS electronics comprising a CRS wavelength detector; operating the CRS system to receive an output spectral profile from a measurement point on a workpiece surface and provide corresponding output spectral profile data; analyzing the output spectral profile data to provide a peak region asymmetry characterization; and providing a corresponding abnormality indicator if the peak region asymmetry characterization indicates that the peak region is abnormally asymmetric.
Public/Granted literature
- US20130222797A1 METHOD FOR IDENTIFYING ABNORMAL SPECTRAL PROFILES MEASURED BY A CHROMATIC CONFOCAL RANGE SENSOR Public/Granted day:2013-08-29
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