Invention Grant
US08928962B2 Optical device, method for manufacturing optical device, and optical scanner 有权
光学装置,光学装置的制造方法和光学扫描仪

Optical device, method for manufacturing optical device, and optical scanner
Abstract:
An optical device includes a base made of silicon and including a movable portion provided with a light reflecting portion having light reflectivity and capable of oscillating around a oscillation axis, at least one connection portion that extends from the movable portion, and a support portion that supports the connection portion, and a stray light suppression layer provided on a surface of the base and having a function of suppressing light reflection. In a plan view in which the base is viewed in a thickness direction thereof, the stray light suppression layer is provided on portions other than an edge of the connection portion, an edge that connects an edge of the movable portion to the edge of the connection portion, and an edge that connects an edge of the support portion to the edge of the connection portion.
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