Invention Grant
- Patent Title: Micromirror arrangement having a coating and method for the production thereof
- Patent Title (中): 具有涂层的微镜布置及其制造方法
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Application No.: US13350719Application Date: 2012-01-13
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Publication No.: US08928980B2Publication Date: 2015-01-06
- Inventor: Karl-Stefan Weissenrieder , Roland Loercher , Alexandra Pazidis
- Applicant: Karl-Stefan Weissenrieder , Roland Loercher , Alexandra Pazidis
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Edell, Shapiro & Finnan, LLC
- Priority: DE102009033511 20090715; DE102009038000 20090820
- Main IPC: G02B1/10
- IPC: G02B1/10 ; G03F7/20

Abstract:
A micromirror arrangement (1) having: at least one micromirror (3) having a reflective surface (11) formed at a mirror substrate (2), and an antireflective coating (7) formed at the mirror substrate (2) outside the reflective surface (11). A reflective coating (8) is formed within the reflective surface (11) and has at least two layer subsystems, wherein the first layer subsystem has layers (8e, 8f) composed of a periodic sequence of alternate high and low refractive index layers composed of a nonmetallic material and is optimized with regard to the reflectivity in respect of a used wavelength of the micromirror arrangement, and wherein the second layer subsystem is optimized with regard to the reflectivity in respect of a measurement wavelength of the micromirror arrangement, said measurement wavelength deviating from the used wavelength.
Public/Granted literature
- US20120182606A1 MICROMIRROR ARRANGEMENT HAVING A COATING AND METHOD FOR THE PRODUCTION THEREOF Public/Granted day:2012-07-19
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