Invention Grant
- Patent Title: Ultraviolet laser device
- Patent Title (中): 紫外线激光装置
-
Application No.: US14003895Application Date: 2012-03-23
-
Publication No.: US08929410B2Publication Date: 2015-01-06
- Inventor: Yoshinori Oshita , Akira Tokuhisa
- Applicant: Yoshinori Oshita , Akira Tokuhisa
- Applicant Address: JP Tokyo
- Assignee: Nikon Corporation
- Current Assignee: Nikon Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2011-066775 20110324
- International Application: PCT/JP2012/057523 WO 20120323
- International Announcement: WO2012/128354 WO 20120927
- Main IPC: H01S3/10
- IPC: H01S3/10 ; G02F1/37

Abstract:
An ultraviolet laser device comprises a laser beam output unit that outputs infra-red laser beams, and a wavelength conversion unit that wavelength converts the infra-red laser beams. The laser beam output unit comprises a first laser beam output unit that outputs a first infra-red laser beam whose wavelength is 1900-2000 nm, and a second laser beam output unit that outputs a second infra-red laser beam whose wavelength is 1000-1100 nm. The wavelength conversion unit comprises a first element series that the first infra-red light beam is incident upon and propagated through, and a second element series that the laser light propagated through the first element series and the second infra-red laser beam are incident upon, combined in, and propagated through, and constructed so that ultraviolet laser light is outputted, due to the first and second infra-red laser beams being wavelength converted by optical wavelength conversion elements.
Public/Granted literature
- US20130343410A1 ULTRAVIOLET LASER DEVICE Public/Granted day:2013-12-26
Information query