Invention Grant
US08930169B2 Capacitive ultrasonic transducer and endo cavity ultrasonic diagnosis system using the same
有权
电容式超声波换能器和内腔超声诊断系统使用相同
- Patent Title: Capacitive ultrasonic transducer and endo cavity ultrasonic diagnosis system using the same
- Patent Title (中): 电容式超声波换能器和内腔超声诊断系统使用相同
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Application No.: US13040922Application Date: 2011-03-04
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Publication No.: US08930169B2Publication Date: 2015-01-06
- Inventor: Hideo Adachi , Katsuhiro Wakabayashi , Akiko Mizunuma , Atsushi Osawa , Tatsuo Kaimai , Shinji Yasunaga , Kiyoshi Nemoto , Miyuki Murakami , Kousei Tamiya , Yu Kondo
- Applicant: Hideo Adachi , Katsuhiro Wakabayashi , Akiko Mizunuma , Atsushi Osawa , Tatsuo Kaimai , Shinji Yasunaga , Kiyoshi Nemoto , Miyuki Murakami , Kousei Tamiya , Yu Kondo
- Applicant Address: JP Tokyo
- Assignee: Olympus Corporation
- Current Assignee: Olympus Corporation
- Current Assignee Address: JP Tokyo
- Agency: Scully, Scott, Murphy & Presser, PC
- Priority: JP2004-312172 20041027; JP2005-014414 20050121; JP2005-014415 20050121
- Main IPC: G06F15/00
- IPC: G06F15/00 ; A61B8/14 ; A61B8/12 ; A61B8/00 ; B06B1/02 ; G10K9/12
Abstract:
A capacitive ultrasonic transducer (c-MUT) comprising a silicon substrate and a transducer element which comprises transducer cells, each of which is constituted by a first electrode equipped on the top surface of the silicon substrate, a second electrode placed opposite to the first electrode with a predetermined gap therefrom and a membrane for supporting the second electrode, wherein a trench is equipped between the adjacent transducers and a conductive film is formed in the trench.
Public/Granted literature
- US20110213592A1 CAPACITIVE ULTRASONIC TRANSDUCER AND ENDO CAVITY ULTRASONIC DIAGNOSIS SYSTEM USING THE SAME Public/Granted day:2011-09-01
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