Invention Grant
US08931342B2 Piezoelectric film and method of manufacturing the same, ink jet head, method of forming image by the ink jet head, angular velocity sensor, method of measuring angular velocity by the angular velocity sensor, piezoelectric generating element, and method of generating electric power using the piezoelectric generating element
有权
压电膜及其制造方法，喷墨头，通过喷墨头形成图像的方法，角速度传感器，角速度传感器测量角速度的方法，压电发生元件以及使用该方法产生电力的方法 压电发电元件
- Patent Title: Piezoelectric film and method of manufacturing the same, ink jet head, method of forming image by the ink jet head, angular velocity sensor, method of measuring angular velocity by the angular velocity sensor, piezoelectric generating element, and method of generating electric power using the piezoelectric generating element
- Patent Title (中): 压电膜及其制造方法，喷墨头，通过喷墨头形成图像的方法，角速度传感器，角速度传感器测量角速度的方法，压电发生元件以及使用该方法产生电力的方法 压电发电元件
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Application No.: US13943343Application Date: 2013-07-16
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Publication No.: US08931342B2Publication Date: 2015-01-13
- Inventor: Takakiyo Harigai , Yoshiaki Tanaka , Hideaki Adachi , Eiji Fujii
- Applicant: Panasonic Corporation
- Applicant Address: JP Osaka
- Assignee: Panasonic Corporation
- Current Assignee: Panasonic Corporation
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: JP2010-148728 20100630
- Main IPC: G01P15/09
- IPC: G01P15/09 ; H01L41/187 ; H01L41/113 ; G01C19/5628 ; H01L41/09 ; G01C19/56 ; B41J2/14 ; H01L41/047 ; H01L41/08 ; H01L41/316
Abstract:
The purpose of the present invention is to provide an angular velocity sensor capable of measuring an exact angular velocity, an ink jet head capable of producing an exact amount of ink, and a piezoelectric generating element capable of generating electric power due to positive piezoelectric effect. In the present invention, a piezoelectric film comprising a first electrode, a piezoelectric layer, and a second electrode is used. The first electrode comprises an electrode layer having a (001) orientation. The piezoelectric layer comprises a (NaxBiy)TiO0.5x+1.5y+2—BaTi03 layer (0.30≦x≦0.46 and 0.51≦y≦0.62) having a (001) orientation.
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