Invention Grant
- Patent Title: Fluid pressure sensor and measurement probe
- Patent Title (中): 流体压力传感器和测量探头
-
Application No.: US13707802Application Date: 2012-12-07
-
Publication No.: US08931347B2Publication Date: 2015-01-13
- Inventor: Eric Donzier , Emmanuel Tavernier
- Applicant: OPENFIELD
- Applicant Address: FR Versailles
- Assignee: Openfield SAS
- Current Assignee: Openfield SAS
- Current Assignee Address: FR Versailles
- Agency: The Jansson Firm
- Agent Pehr B. Jansson
- Priority: FR1161376 20111209
- Main IPC: G01L9/00
- IPC: G01L9/00 ; B81C1/00

Abstract:
A fluid pressure measurement sensor (11) comprises a microelectromechanical system (MEMS) chip (23). The MEMS chip (23) comprises two lateral walls (56), a sensitive membrane (49) connected to said lateral walls (56) and sealed cavity (9). The exterior surfaces of the lateral walls (56) and the sensitive membrane (49) are exposed to the fluid pressure. The lateral walls (56) are designed to subject the sensitive membrane (49) to a compression stress transmitted by the opposite lateral walls (56) where said lateral walls (56) are connected to the sensitive membrane (49) such that the sensitive membrane (49) works in compression only. The MEMS chip (23) also comprises a stress detection circuit (31) to measure the compression state of the sensitive membrane (49) which is proportional to the fluid pressure.
Public/Granted literature
- US20130145853A1 FLUID PRESSURE SENSOR AND MEASUREMENT PROBE Public/Granted day:2013-06-13
Information query