A process fluid pump can include a pump chamber, an inlet valve, and an outlet valve. Diaphragm regions can define at least a portion of each of the pump chamber, the inlet valve, and the outlet valve. The diaphragm regions can each have an actuation region with a surface that is convexly shaped when the formed actuation region is in a natural unstressed first state, and each formed actuation region can be actuated by a motive fluid to transition to a second state in which the surface is non-convexly shaped.