Invention Grant
- Patent Title: Substrate cleaning method
- Patent Title (中): 基材清洗方法
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Application No.: US13894331Application Date: 2013-05-14
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Publication No.: US08932407B2Publication Date: 2015-01-13
- Inventor: Tomoatsu Ishibashi
- Applicant: Ebara Corporation
- Applicant Address: JP Tokyo
- Assignee: Ebara Corporation
- Current Assignee: Ebara Corporation
- Current Assignee Address: JP Tokyo
- Agency: Baker & Hostetler LLP
- Priority: JP2012-117344 20120523; JP2013-041494 20130304
- Main IPC: B08B7/04
- IPC: B08B7/04 ; H01L21/02 ; B08B1/04

Abstract:
A substrate cleaning method is used for performing scrub cleaning of a surface of a substrate. The substrate cleaning method includes rotating a roll cleaning member and a substrate respectively in one direction while keeping the roll cleaning member in contact with the substrate in a cleaning area, and supplying a cleaning liquid to a surface of the substrate to scrub-clean the surface of the substrate in the presence of the cleaning liquid in the cleaning area. The cleaning liquid is supplied initially to an inverse-direction cleaning area of the cleaning area where the relative rotational velocity between the roll cleaning member and the substrate is relatively high, and thereafter to a forward-direction cleaning area of the cleaning area where the relative rotational velocity between the roll cleaning member and the substrate is relatively low while the substrate makes one revolution on a central axis thereof.
Public/Granted literature
- US20130312790A1 SUBSTRATE CLEANING METHOD Public/Granted day:2013-11-28
Information query
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