Invention Grant
US08932473B2 Method for making a 3D nanostructure having a nanosubstructure, and an insulating pyramid having a metallic tip, a pyramid having nano-apertures and horizontal and/or vertical nanowires obtainable by this method
有权
制造具有纳米级结构的3D纳米结构的方法和具有金属尖端的绝缘金字塔，具有纳米孔的金字塔和通过该方法可获得的水平和/或垂直的纳米线
- Patent Title: Method for making a 3D nanostructure having a nanosubstructure, and an insulating pyramid having a metallic tip, a pyramid having nano-apertures and horizontal and/or vertical nanowires obtainable by this method
- Patent Title (中): 制造具有纳米级结构的3D纳米结构的方法和具有金属尖端的绝缘金字塔，具有纳米孔的金字塔和通过该方法可获得的水平和/或垂直的纳米线
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Application No.: US12811674Application Date: 2008-12-22
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Publication No.: US08932473B2Publication Date: 2015-01-13
- Inventor: Johan Willem Berenschot , Niels Roelof Tas
- Applicant: Johan Willem Berenschot , Niels Roelof Tas
- Applicant Address: NL Enschede
- Assignee: Universiteit Twente
- Current Assignee: Universiteit Twente
- Current Assignee Address: NL Enschede
- Agency: Bozicevic, Field & Francis LLP
- Agent Bret E. Field
- Priority: EP08000094 20080106
- International Application: PCT/EP2008/011107 WO 20081222
- International Announcement: WO2009/086915 WO 20090716
- Main IPC: C03C15/00
- IPC: C03C15/00 ; C03C25/68 ; B81C1/00 ; G01Q70/10 ; G01Q70/16 ; B82Y35/00
Abstract:
The invention relates to a method for making a 3D nanostructure having a nanosubstructure, comprising the steps of: i) providing a mold comprising at least one sharp concave corner; ii) conformational depositing at least one structural material in the sharp concave corner; iii) isotropically removing structural material; iv) depositing at least one other structural material; v) removing earlier deposited structural material; vi) forming a nanosubstructure; and vii) removing the mold thereby providing the 3D nanostructure having the nanosubstructure.
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