Invention Grant
- Patent Title: Plate and shaft device
- Patent Title (中): 板和轴装置
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Application No.: US13543727Application Date: 2012-07-06
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Publication No.: US08932690B2Publication Date: 2015-01-13
- Inventor: Alfred Grant Elliot , Dennis George Rex , Alexander Veytser , Brent Donald Alfred Elliot , Frank Balma , Richard Erich Schuster
- Applicant: Alfred Grant Elliot , Dennis George Rex , Alexander Veytser , Brent Donald Alfred Elliot , Frank Balma , Richard Erich Schuster
- Applicant Address: US CA Santa Clara
- Assignee: Component Re-Engineering Company, Inc.
- Current Assignee: Component Re-Engineering Company, Inc.
- Current Assignee Address: US CA Santa Clara
- Agent Michael A. Guth
- Main IPC: B32B1/00
- IPC: B32B1/00

Abstract:
A method for the joining of a ceramic shaft and a ceramic plate into an assembly, such as a heater, adapted to be used in semiconductor processing. The joined pieces are adapted to withstand the environments within a process chamber during substrate processing, chamber cleaning processes, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck. The ceramic pieces may be aluminum nitride and the pieces may be brazed with aluminum. The joint material is adapted to withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck. The joint is adapted to provide a hermetic seal across the joint. The joined pieces are adapted to be separated at a later time should rework or replacement of one of the pieces be desired.
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