Invention Grant
- Patent Title: Methods and systems of curved radiation detector fabrication
- Patent Title (中): 弯曲辐射探测器制造的方法和系统
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Application No.: US12581469Application Date: 2009-10-19
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Publication No.: US08932894B2Publication Date: 2015-01-13
- Inventor: Marc Christophersen , Bernard F. Phlips
- Applicant: Marc Christophersen , Bernard F. Phlips
- Applicant Address: US DC Washington
- Assignee: The United States of America, as represented by the Secratary of the Navy
- Current Assignee: The United States of America, as represented by the Secratary of the Navy
- Current Assignee Address: US DC Washington
- Agency: US Naval Research Laboratory
- Agent John Leonard Young
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L31/115 ; H01L31/0224 ; H01L31/18
Abstract:
Gray tone lithography is used to form curved silicon topographies for semiconductor based solid-state imaging devices. The imagers are curved to a specific curvature and shaped directly for the specific application; such as curved focal planes. The curvature of the backside is independent from the front surface, which allows thinning of the detector using standard semiconductor processing.
Public/Granted literature
- US20100264502A1 METHODS AND SYSTEMS OF CURVED RADIATION DETECTOR FABRICATION Public/Granted day:2010-10-21
Information query
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