Invention Grant
- Patent Title: Thermocompression for semiconductor chip assembly
- Patent Title (中): 半导体芯片组装热压缩
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Application No.: US13676250Application Date: 2012-11-14
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Publication No.: US08932909B2Publication Date: 2015-01-13
- Inventor: Julien Sylvestre
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Keivan Razavi; Catherine Ivers
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method of assembling a semiconductor chip to a substrate wherein at least one of the semiconductor chip and substrate comprise solder bumps. The method includes aligning the semiconductor chip with the substrate; applying a compression force to the semiconductor chip to cause the solder bumps to deform between the semiconductor chip pads and the substrate pads, the compression force being applied while the semiconductor chip and substrate are held at a temperature above room temperature and below a temperature at which any liquid will form in at least one of the solder bumps; then applying an underfill material to fill the gap between the chip and substrate; and then heating the assembled semiconductor chip and substrate to an elevated temperature to cause the solder bumps to melt and reflow and form a metallurgical bond between the semiconductor chip pads and the substrate pads.
Public/Granted literature
- US20140131855A1 THERMOCOMPRESSION FOR SEMICONDUCTOR CHIP ASSEMBLY Public/Granted day:2014-05-15
Information query
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