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US08933374B2 Pulse laser machining apparatus and pulse laser machining method 有权
脉冲激光加工设备和脉冲激光加工方法

Pulse laser machining apparatus and pulse laser machining method
Abstract:
A pulse laser machining apparatus and method generates a clock signal, emits a pulse laser beam in synchronization with the clock signal, scans the pulse laser beam in synchronization with the clock signal only in a one-dimensional direction, moves a stage in a direction perpendicular to the one-dimensional direction, passes or cuts off the pulse laser beam in synchronization with the clock signal, and controls the passing or cutting off of the pulse laser beam based on the number of light pulses of the pulse laser beam.
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