Invention Grant
- Patent Title: MOSFET and method for manufacturing the same
- Patent Title (中): MOSFET及其制造方法
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Application No.: US13208964Application Date: 2011-08-12
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Publication No.: US08933512B2Publication Date: 2015-01-13
- Inventor: Huilong Zhu , Miao Xu , Qingqing Liang
- Applicant: Huilong Zhu , Miao Xu , Qingqing Liang
- Applicant Address: CN Beijing
- Assignee: Institute of Microelectronics, Chinese Academy of Science
- Current Assignee: Institute of Microelectronics, Chinese Academy of Science
- Current Assignee Address: CN Beijing
- Agency: Osha Liang LLP
- Priority: CN201010573204 20101203
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L29/772 ; H01L29/786

Abstract:
The present application discloses a MOSFET and a method for manufacturing the same. The MOSFET comprises an SOI wafer, which comprises a bottom semiconductor substrate, a first buried insulating layer on the bottom semiconductor substrate, and a first semiconductor layer on the first buried insulating layer; a source region and a drain region which are formed in a second semiconductor layer over the SOI wafer, wherein there is a second buried insulating layer between the second semiconductor layer and the SOI wafer; a channel region, which is formed in the second semiconductor layer and located between the source region and the drain regions; and a gate stack, which comprises a gate dielectric layer on the second semiconductor layer and a gate conductor on the gate dielectric layer, wherein the MOSFET further comprises a backgate formed in a portion of the first semiconductor substrate below the channel region, the backgate having a non-uniform doping profile, and the second buried insulating layer serving as a gate dielectric layer of the backgate. The MOSFET has an adjustable threshold voltage by changing the polarity of dopants and/or the doping profile in the backgate. Leakage in the semiconductor device can be reduced.
Public/Granted literature
- US20120139044A1 MOSFET AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2012-06-07
Information query
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