Invention Grant
- Patent Title: Landing structure for through-silicon via
- Patent Title (中): 穿硅通孔的着陆结构
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Application No.: US13725917Application Date: 2012-12-21
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Publication No.: US08933564B2Publication Date: 2015-01-13
- Inventor: Christopher M. Pelto , Ruth A. Brain , Kevin J. Lee , Gerald S. Leatherman
- Applicant: Christopher M. Pelto , Ruth A. Brain , Kevin J. Lee , Gerald S. Leatherman
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L21/768

Abstract:
Embodiments of the present disclosure describe techniques and configurations associated with forming a landing structure for a through-silicon via (TSV) using interconnect structures of interconnect layers. In eon embodiment, an apparatus includes a semiconductor substrate having a first surface and a second surface opposite to the first surface, a device layer disposed on the first surface of the semiconductor substrate, the device layer including one or more transistor devices, interconnect layers disposed on the device layer, the interconnect layers including a plurality of interconnect structures and one or more through-silicon vias disposed between the first surface and the second surface, wherein the plurality of interconnect structures include interconnect structures that are electrically coupled with the one or more TSVs and configured to provide one or more corresponding landing structures of the one or more TSVs. Other embodiments may be described and/or claimed.
Public/Granted literature
- US20140175651A1 LANDING STRUCTURE FOR THROUGH-SILICON VIA Public/Granted day:2014-06-26
Information query
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