Invention Grant
- Patent Title: Method and apparatus for performing alignment using reference board
- Patent Title (中): 使用参考板执行对准的方法和装置
-
Application No.: US12929977Application Date: 2011-02-28
-
Publication No.: US08934081B2Publication Date: 2015-01-13
- Inventor: Mikael Wahlsten , Raoul Zerne
- Applicant: Mikael Wahlsten , Raoul Zerne
- Applicant Address: SE Taby
- Assignee: Mycronic AB
- Current Assignee: Mycronic AB
- Current Assignee Address: SE Taby
- Agency: Harness, Dickey & Pierce, P.L.C.
- Main IPC: G03B27/42
- IPC: G03B27/42 ; H05K3/00 ; G03F9/00 ; H05K1/02
Abstract:
An alignment method for the of patterning a work piece in a direct write machine, wherein a reference board provided with board reference features is used to coordinate calibration of a measurement station and a writing station against a common reference. An adjusted pattern is for writing on the work piece is calculated relative to the position of the reference board.
Public/Granted literature
- US20110228242A1 Method and apparatus for performing alignment using reference board Public/Granted day:2011-09-22
Information query
