Invention Grant
US08934104B2 Method and arrangement for robust interferometry for detecting a feature of an object 有权
用于检测物体特征的鲁棒干涉测量的方法和装置

  • Patent Title: Method and arrangement for robust interferometry for detecting a feature of an object
  • Patent Title (中): 用于检测物体特征的鲁棒干涉测量的方法和装置
  • Application No.: US13574707
    Application Date: 2011-01-21
  • Publication No.: US08934104B2
    Publication Date: 2015-01-13
  • Inventor: Klaus KoernerReinhard BergerWolfgang Osten
  • Applicant: Klaus KoernerReinhard BergerWolfgang Osten
  • Applicant Address: DE Stuttgart
  • Assignee: Universitaet Stuttgart
  • Current Assignee: Universitaet Stuttgart
  • Current Assignee Address: DE Stuttgart
  • Agent Gerald E. Hespos; Michael J. Porco; Matthew T. Hespos
  • Priority: DE102010006239 20100122
  • International Application: PCT/EP2011/000248 WO 20110121
  • International Announcement: WO2011/089010 WO 20110728
  • Main IPC: G01B11/02
  • IPC: G01B11/02 G01B9/02
Method and arrangement for robust interferometry for detecting a feature of an object
Abstract:
An arrangement and a method are provided for robust interferometry for detecting distance, depth, profile, form, undulation, flatness deviation and/or roughness or the optical path length in or on technical or biological objects, including in layered form, or else for optical coherence tomography (OCT), with a source of electromagnetic radiation and with an interferometer, in particular also in the form of an interference microscope, having an object beam path and having a reference beam path, in which an end reflector is arranged, and a line-scan detector for detecting electromagnetic radiation in the form of at least one spatial interferogram.
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