Invention Grant
US08934104B2 Method and arrangement for robust interferometry for detecting a feature of an object
有权
用于检测物体特征的鲁棒干涉测量的方法和装置
- Patent Title: Method and arrangement for robust interferometry for detecting a feature of an object
- Patent Title (中): 用于检测物体特征的鲁棒干涉测量的方法和装置
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Application No.: US13574707Application Date: 2011-01-21
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Publication No.: US08934104B2Publication Date: 2015-01-13
- Inventor: Klaus Koerner , Reinhard Berger , Wolfgang Osten
- Applicant: Klaus Koerner , Reinhard Berger , Wolfgang Osten
- Applicant Address: DE Stuttgart
- Assignee: Universitaet Stuttgart
- Current Assignee: Universitaet Stuttgart
- Current Assignee Address: DE Stuttgart
- Agent Gerald E. Hespos; Michael J. Porco; Matthew T. Hespos
- Priority: DE102010006239 20100122
- International Application: PCT/EP2011/000248 WO 20110121
- International Announcement: WO2011/089010 WO 20110728
- Main IPC: G01B11/02
- IPC: G01B11/02 ; G01B9/02

Abstract:
An arrangement and a method are provided for robust interferometry for detecting distance, depth, profile, form, undulation, flatness deviation and/or roughness or the optical path length in or on technical or biological objects, including in layered form, or else for optical coherence tomography (OCT), with a source of electromagnetic radiation and with an interferometer, in particular also in the form of an interference microscope, having an object beam path and having a reference beam path, in which an end reflector is arranged, and a line-scan detector for detecting electromagnetic radiation in the form of at least one spatial interferogram.
Public/Granted literature
- US20120307258A1 METHOD AND ARRANGEMENT FOR ROBUST INTERFEROMETRY Public/Granted day:2012-12-06
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