Invention Grant
- Patent Title: Wafer center finding with kalman filter
- Patent Title (中): 晶圆中心发现与卡尔曼滤波器
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Application No.: US14159223Application Date: 2014-01-20
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Publication No.: US08934706B2Publication Date: 2015-01-13
- Inventor: Christopher C. Kiley , Peter van der Meulen , Forrest T. Buzan , Paul E. Fogel
- Applicant: Brooks Automation, Inc.
- Applicant Address: US MA Chelmsford
- Assignee: Brooks Automation, Inc.
- Current Assignee: Brooks Automation, Inc.
- Current Assignee Address: US MA Chelmsford
- Agency: Perman & Green, LLP
- Agent Colin C. Durham
- Main IPC: G06K9/00
- IPC: G06K9/00 ; G06K9/40 ; H01L21/68 ; G05B19/02 ; B65G25/02 ; B65G37/00 ; H01L21/67 ; H01L21/677
Abstract:
A device is provided having a robotic arm for handling a wafer, the robotic arm including one or more encoders that provide encoder data identifying a position of one or more components of the robotic arm. The device also having a processor adapted to apply an extended Kalman Filter to the encoder data to estimate a position of the wafer.
Public/Granted literature
- US20140207284A1 WAFER CENTER FINDING WITH KALMAN FILTER Public/Granted day:2014-07-24
Information query
