Invention Grant
US08936293B2 Robotic device for substrate transfer applications 有权
用于衬底转移应用的机器人装置

Robotic device for substrate transfer applications
Abstract:
A device for use in the semiconductor industry includes a robotic arm whose end effector includes electromagnetic means to hold a substrate carrier. A pushing member can move independently of a flat, spatula-like portion of the device and is configured to exert force against the substrate carrier while the spatula-like portion is retracted from the substrate carrier, after the substrate carrier has been brought to its intended position. In this manner, the position of the substrate carrier is maintained at its intended position as the spatula-like portion is retracted.
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