Invention Grant
US08936956B2 Substrate moving unit for deposition, deposition apparatus including the same, method of manufacturing organic light-emitting display apparatus by using the deposition apparatus, and organic light-emitting display apparatus manufactured by using the method
有权
用于沉积的基板移动单元，包括该沉积设备的沉积设备，使用沉积设备制造有机发光显示设备的方法，以及使用该方法制造的有机发光显示设备
- Patent Title: Substrate moving unit for deposition, deposition apparatus including the same, method of manufacturing organic light-emitting display apparatus by using the deposition apparatus, and organic light-emitting display apparatus manufactured by using the method
- Patent Title (中): 用于沉积的基板移动单元，包括该沉积设备的沉积设备，使用沉积设备制造有机发光显示设备的方法，以及使用该方法制造的有机发光显示设备
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Application No.: US14099540Application Date: 2013-12-06
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Publication No.: US08936956B2Publication Date: 2015-01-20
- Inventor: Jeong-Won Han
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR
- Agency: Innovation Counsel LLP
- Priority: KR10-2013-0059930 20130527
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L51/56
Abstract:
Provided are a substrate moving unit for use with a deposition apparatus that allows a deposition material to be precisely deposited on a target site of a substrate. The substrate moving unit includes an electrostatic chuck having a first surface on which a substrate is fixable and a magnetic force applying unit disposed on a second surface of the electrostatic chuck. A deposition apparatus including the substrate moving unit, a method of manufacturing an organic light-emitting display apparatus, and an organic light-emitting display apparatus manufactured by using the method are also presented.
Public/Granted literature
Information query
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