Invention Grant
US08937289B2 High heat load optics with vibration isolated hoses in an extreme ultraviolet lithography system 有权
高耐热光学元件,在极紫外光刻系统中具有隔离软管

  • Patent Title: High heat load optics with vibration isolated hoses in an extreme ultraviolet lithography system
  • Patent Title (中): 高耐热光学元件,在极紫外光刻系统中具有隔离软管
  • Application No.: US13833565
    Application Date: 2013-03-15
  • Publication No.: US08937289B2
    Publication Date: 2015-01-20
  • Inventor: Douglas C. WatsonTravis Bow
  • Applicant: Nikon
  • Applicant Address: JP Tokyo
  • Assignee: Nikon Corporation
  • Current Assignee: Nikon Corporation
  • Current Assignee Address: JP Tokyo
  • Main IPC: G21K5/04
  • IPC: G21K5/04 G03F7/20
High heat load optics with vibration isolated hoses in an extreme ultraviolet lithography system
Abstract:
Methods and apparatus for reducing vibrations in an extreme ultraviolet (EUV) lithography system associated with the cooling of mirrors are described. According to one aspect of the present invention, an apparatus includes a first assembly, a structure, a vibration isolator, and a hose arrangement. The first assembly includes a heat exchanger and a mirror assembly. The structure is subject to vibrations, and the vibration isolator is arranged to attenuate the vibrations when the vibrations are transmitted through the hose arrangement. The hose arrangement being coupled between the heat exchanger and the structure, and the vibration isolator is coupled to the hose arrangement.
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