Invention Grant
US08937770B2 Excimer laser apparatus projecting a beam with a selectively variable short-axis beam profile
有权
准分子激光装置用选择性可变的短轴光束轮廓投影光束
- Patent Title: Excimer laser apparatus projecting a beam with a selectively variable short-axis beam profile
- Patent Title (中): 准分子激光装置用选择性可变的短轴光束轮廓投影光束
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Application No.: US13557073Application Date: 2012-07-24
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Publication No.: US08937770B2Publication Date: 2015-01-20
- Inventor: Frank Simon , Paul Van Der Wilt , Ludwig Schwenger
- Applicant: Frank Simon , Paul Van Der Wilt , Ludwig Schwenger
- Applicant Address: DE Göttingen
- Assignee: Coherent GmbH
- Current Assignee: Coherent GmbH
- Current Assignee Address: DE Göttingen
- Agency: Morrison & Foerster LLP
- Main IPC: G02B27/10
- IPC: G02B27/10 ; G02B13/08 ; G02B27/09 ; B23K26/00 ; H01L21/02
Abstract:
Apparatus for homogenizing and projecting two laser-beams is arranged such that the projected homogenized beams are aligned parallel to each other in a first transverse axis and partially overlap in second transverse axis perpendicular to the first transverse axis. The projected homogenized laser-beams have different intensities in the second axis and the degree of partial overlap is selected such that the combined intensity of the laser beams in the second axis has a step profile.
Public/Granted literature
- US20140027417A1 EXCIMER LASER APPARATUS PROJECTING A BEAM WITH A SELECTIVELY VARIABLE SHORT-AXIS BEAM PROFILE Public/Granted day:2014-01-30
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