Invention Grant
- Patent Title: Non-volatile memory device and method of manufacturing the same
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Application No.: US13541873Application Date: 2012-07-05
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Publication No.: US08941172B2Publication Date: 2015-01-27
- Inventor: Hyun Seung Yoo
- Applicant: Hyun Seung Yoo
- Applicant Address: KR Gyeonggi-do
- Assignee: SK Hynix Inc.
- Current Assignee: SK Hynix Inc.
- Current Assignee Address: KR Gyeonggi-do
- Agency: William Park & Associates Patent Ltd.
- Priority: KR10-2011-0066804 20110706
- Main IPC: H01L29/72
- IPC: H01L29/72 ; H01L27/115 ; H01L29/792 ; G11C16/04

Abstract:
A non-volatile memory device includes first and second vertical channel layers generally protruding upwardly from a semiconductor substrate substantially in parallel; a first gate group configured to include a plurality of memory cell gates which are stacked substantially along the first vertical channel layer and are isolated from each other with an interlayer insulating layer interposed substantially between the memory cell gates; a second gate group configured to include a plurality of memory cell gates which are stacked substantially along the second vertical channel layer and are isolated from each other with the interlayer insulating layer interposed substantially between the memory cell gates; a pipe channel layer configured to couple the first and the second vertical channel layers; and a channel layer extension part generally extended from the pipe channel layer to the semiconductor substrate and configured to couple the pipe channel layer and the semiconductor substrate.
Public/Granted literature
- US20130009235A1 NON-VOLATILE MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2013-01-10
Information query
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