Invention Grant
- Patent Title: Microelectromechanical optical shutter system
- Patent Title (中): 微机电光学快门系统
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Application No.: US12963578Application Date: 2010-12-08
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Publication No.: US08941907B2Publication Date: 2015-01-27
- Inventor: Alexandros P. Papavasiliou , Robert E. Mihailovich , John E. Mansell , Graham J. Martin
- Applicant: Alexandros P. Papavasiliou , Robert E. Mihailovich , John E. Mansell , Graham J. Martin
- Applicant Address: US CA Thousand Oaks
- Assignee: Teledyne Scientific & Imaging, LLC.
- Current Assignee: Teledyne Scientific & Imaging, LLC.
- Current Assignee Address: US CA Thousand Oaks
- Agency: Brooks Acordia IP Law, PC
- Main IPC: G02B26/02
- IPC: G02B26/02 ; B29D11/00 ; G02B6/35 ; G02B26/08

Abstract:
A microelectromechanical shutter system includes an actuator beam formed in a substrate, at least one actuator electrode spaced apart and electrically isolated from the actuator beam, the at least one actuator electrode angling away from a base of the actuator beam to actuate the actuator beam using a zipper action, and a fiber-optic channel in the substrate to receive a fiber-optic cable. A shutter mirror is included on a distal end of the actuator beam, with the shutter mirror in substantial alignment with a centerline of the fiber-optic channel. Upon application of a voltage between the actuator beam and the at least one actuator electrode, an electrostatic force is created between them to move the shutter mirror across the end of the fiber-optic channel.
Public/Granted literature
- US20120162741A1 MICROELECTROMECHANICAL OPTICAL SHUTTER SYSTEM Public/Granted day:2012-06-28
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