Invention Grant
US08941920B2 Method of producing optical element and optical element 有权
制造光学元件和光学元件的方法

Method of producing optical element and optical element
Abstract:
Provided are an optical element and a method of producing an optical element in which sufficient adhesion with an upper layer can be secured without damaging spectral characteristics. The production method includes the step of forming a first structural body in which a space part and a structural part are alternately and repeatedly arranged, the step of forming an etching stopper layer on an upper part of the structural part, and the step of forming a second structural body on the etching stopper layer by etching.
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