Invention Grant
- Patent Title: Method of producing optical element and optical element
- Patent Title (中): 制造光学元件和光学元件的方法
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Application No.: US13055663Application Date: 2009-07-07
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Publication No.: US08941920B2Publication Date: 2015-01-27
- Inventor: Kazuhiro Arai , Jun-ichi Sakamoto , Junji Terada , Noriyuki Nakai
- Applicant: Kazuhiro Arai , Jun-ichi Sakamoto , Junji Terada , Noriyuki Nakai
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon USA Inc. IP Division
- Priority: JP2008-193696 20080728; JP2009-155669 20090630; JP2009-167908 20090716
- International Application: PCT/JP2009/063704 WO 20090707
- International Announcement: WO2010/013821 WO 20100204
- Main IPC: G02B5/30
- IPC: G02B5/30 ; G02B5/18 ; G02B27/28

Abstract:
Provided are an optical element and a method of producing an optical element in which sufficient adhesion with an upper layer can be secured without damaging spectral characteristics. The production method includes the step of forming a first structural body in which a space part and a structural part are alternately and repeatedly arranged, the step of forming an etching stopper layer on an upper part of the structural part, and the step of forming a second structural body on the etching stopper layer by etching.
Public/Granted literature
- US20110123765A1 METHOD OF PRODUCING OPTICAL ELEMENT AND OPTICAL ELEMENT Public/Granted day:2011-05-26
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