Invention Grant
US08941951B2 Head suspension flexure with integrated strain sensor and sputtered traces
有权
头部悬挂挠曲与集成应变传感器和溅射痕迹
- Patent Title: Head suspension flexure with integrated strain sensor and sputtered traces
- Patent Title (中): 头部悬挂挠曲与集成应变传感器和溅射痕迹
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Application No.: US14092758Application Date: 2013-11-27
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Publication No.: US08941951B2Publication Date: 2015-01-27
- Inventor: Jeffry S. Bennin , Jacob D. Bjorstrom , Peter F. Ladwig , Paul V. Pesavento , Zachary A. Pokornowski
- Applicant: Hutchinson Technology Incorporated
- Applicant Address: US MN Hutchinson
- Assignee: Hutchinson Technology Incorporated
- Current Assignee: Hutchinson Technology Incorporated
- Current Assignee Address: US MN Hutchinson
- Agency: Faegre Baker Daniels LLP
- Main IPC: G11B5/48
- IPC: G11B5/48 ; C23C28/00 ; G11B5/55 ; G11B5/596

Abstract:
Various embodiments concern a method for manufacturing a disk drive head suspension component. Such methods can comprise providing a head suspension component comprising a layer of insulating material on a spring metal layer. Such methods can further comprise forming a strain gauge element and a trace seed layer by depositing a first metal on the insulating material layer, such as by sputtering. The strain gauge element and the trace seed layer can be formed simultaneously by the depositing of the first metal as part of the same process step. The first metal can be of a strain gauge class of metal having relatively high resistivity, such as constantan. Such methods can further comprise plating a second metal on the trace seed layer to form one or more traces.
Public/Granted literature
- US20140146649A1 HEAD SUSPENSION FLEXURE WITH INTEGRATED STRAIN SENSOR AND SPUTTERED TRACES Public/Granted day:2014-05-29
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