Invention Grant
US08941951B2 Head suspension flexure with integrated strain sensor and sputtered traces 有权
头部悬挂挠曲与集成应变传感器和溅射痕迹

Head suspension flexure with integrated strain sensor and sputtered traces
Abstract:
Various embodiments concern a method for manufacturing a disk drive head suspension component. Such methods can comprise providing a head suspension component comprising a layer of insulating material on a spring metal layer. Such methods can further comprise forming a strain gauge element and a trace seed layer by depositing a first metal on the insulating material layer, such as by sputtering. The strain gauge element and the trace seed layer can be formed simultaneously by the depositing of the first metal as part of the same process step. The first metal can be of a strain gauge class of metal having relatively high resistivity, such as constantan. Such methods can further comprise plating a second metal on the trace seed layer to form one or more traces.
Information query
Patent Agency Ranking
0/0