Invention Grant
- Patent Title: Heated electrostatic chuck including mechanical clamp capability at high temperature
- Patent Title (中): 加热静电卡盘包括高温下的机械夹紧能力
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Application No.: US13152735Application Date: 2011-06-03
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Publication No.: US08941968B2Publication Date: 2015-01-27
- Inventor: Perry J. I. Justesen , Allan D. Weed , William Davis Lee , Ashwin M. Purohit , Robert D. Rathmell , Gary M. Cook
- Applicant: Perry J. I. Justesen , Allan D. Weed , William Davis Lee , Ashwin M. Purohit , Robert D. Rathmell , Gary M. Cook
- Applicant Address: US MA Beverly
- Assignee: Axcelis Technologies, Inc.
- Current Assignee: Axcelis Technologies, Inc.
- Current Assignee Address: US MA Beverly
- Agency: Eschweiler & Associates, LLC
- Main IPC: H01L21/687
- IPC: H01L21/687 ; H01L21/683
Abstract:
An electrostatic clamp is provided, having a clamping plate, wherein a clamping surface of the clamping plate is configured to contact the workpiece. A voltage applied to one or more electrodes selectively electrostatically attracts the workpiece to the clamping surface. One or more auxiliary clamping members are further provided wherein the one or more auxiliary clamping members are configured to selectively secure at least a portion of the workpiece to the clamping surface. A temperature monitoring device configured to determine a temperature of the workpiece is provided, and a controller is configured to selectively clamp the workpiece to the clamping surface via a control of the voltage to the one or more electrodes and the one or more auxiliary clamping members, based, at least in part, on the temperature of the workpiece.
Public/Granted literature
- US20110299217A1 HEATED ELECTROSTATIC CHUCK INCLUDING MECHANICAL CLAMP CAPABILITY AT HIGH TEMPERATURE Public/Granted day:2011-12-08
Information query
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