Invention Grant
- Patent Title: Capacitive pressure sensor
- Patent Title (中): 电容式压力传感器
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Application No.: US13607602Application Date: 2012-09-07
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Publication No.: US08943895B2Publication Date: 2015-02-03
- Inventor: Leo E. Barron , John A. Czazasty
- Applicant: Leo E. Barron , John A. Czazasty
- Applicant Address: US MA Franklin
- Assignee: Dynisco Instruments LLC
- Current Assignee: Dynisco Instruments LLC
- Current Assignee Address: US MA Franklin
- Agency: Wolf, Greenfield & Sacks, P.C.
- Main IPC: G01L9/12
- IPC: G01L9/12

Abstract:
Pressure sensors and their methods of use are described. In one embodiment, a pressure sensor includes a pressure deflectable diaphragm end formed of a first material with a first coefficient of thermal expansion, and a relatively non-deformable component formed of a second material having a second coefficient of thermal expansion. The pressure deflectable diaphragm end and the non-deformable component form a first and a second portion of a capacitor. An intermediate component separates, or is disposed between, the pressure deflectable diaphragm end and the relatively non-deformable component. The intermediate component is formed of a material with a coefficient of thermal expansion that is less than the first coefficient of thermal expansion which may help minimize changes in span with temperature. In other embodiments, a pressure sensor includes an intermediate circuit located between a distal end of the pressure sensor and a remotely located circuit enclosure including a main circuit.
Public/Granted literature
- US20140069199A1 CAPACITIVE PRESSURE SENSOR Public/Granted day:2014-03-13
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