Invention Grant
US08944080B2 Cleaning system, cleaning device, and method of using cleaning device
有权
清洁系统,清洁装置和使用清洁装置的方法
- Patent Title: Cleaning system, cleaning device, and method of using cleaning device
- Patent Title (中): 清洁系统,清洁装置和使用清洁装置的方法
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Application No.: US13196086Application Date: 2011-08-02
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Publication No.: US08944080B2Publication Date: 2015-02-03
- Inventor: Yen-Shao Peng , Chia-Hao Hsueh , Kuo-Hsing Teng
- Applicant: Yen-Shao Peng , Chia-Hao Hsueh , Kuo-Hsing Teng
- Applicant Address: TW Hsinchu
- Assignee: VisEra Technologies Company Limited
- Current Assignee: VisEra Technologies Company Limited
- Current Assignee Address: TW Hsinchu
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Main IPC: B08B9/027
- IPC: B08B9/027 ; H01L21/67

Abstract:
A cleaning device is provided, including a top portion, a middle portion, and a bottom portion. The top portion includes a first opening. The middle portion is connected to the top portion, and includes an inlet on a lateral side, an annular channel communicated with the inlet, and a second opening communicated with the first opening. The bottom portion is connected to the middle portion, and includes a reservoir and a third opening. The third opening communicates the second opening and the reservoir.
Public/Granted literature
- US20130032173A1 CLEANING SYSTEM, CLEANING DEVICE, AND METHOD OF USING CLEANING DEVICE Public/Granted day:2013-02-07
Information query
IPC分类: