Invention Grant
US08944570B2 Piezoelectric film and ink jet head and angular velocity sensor using the same
有权
压电薄膜和喷墨头和角速度传感器使用相同
- Patent Title: Piezoelectric film and ink jet head and angular velocity sensor using the same
- Patent Title (中): 压电薄膜和喷墨头和角速度传感器使用相同
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Application No.: US13856769Application Date: 2013-04-04
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Publication No.: US08944570B2Publication Date: 2015-02-03
- Inventor: Takakiyo Harigai , Yoshiaki Tanaka , Hideaki Adachi , Eiji Fujii
- Applicant: Panasonic Corporation
- Applicant Address: JP Osaka
- Assignee: Panasonic Corporation
- Current Assignee: Panasonic Corporation
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: JP2010-136962 20100616
- Main IPC: B41J2/045
- IPC: B41J2/045 ; H01L41/00 ; H02N2/00 ; G01P3/44 ; H01L41/047 ; C23C14/00 ; C23C14/08 ; H01L41/09 ; B41J2/14 ; G01C19/5621 ; H01L41/113 ; C23C14/02 ; H01L41/187 ; G01C19/5628
Abstract:
A piezoelectric film comprising comprises a (NaxBiy)TiO0.5x+1.5y+2—BaTiO3 layer with a (110) orientation, where 0.30≦x≦0.46 and 0.51≦y≦0.62, and the (NaxBiy)TiO0.5x+1.5y+2—BaTiO3 layer has composition around a Morphotropic Phase Boundary.
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