Invention Grant
- Patent Title: Loadport bridge for semiconductor fabrication tools
- Patent Title (中): 用于半导体制造工具的承载桥
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Application No.: US13486024Application Date: 2012-06-01
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Publication No.: US08944739B2Publication Date: 2015-02-03
- Inventor: Shih-Hung Chen , Ying Xiao , Chin-Hsiang Lin
- Applicant: Shih-Hung Chen , Ying Xiao , Chin-Hsiang Lin
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Duane Morris LLP
- Main IPC: H01L21/677
- IPC: H01L21/677

Abstract:
A wafer handling system with apparatus for transporting wafers between semiconductor fabrication tools. In one embodiment, the apparatus is a loadport bridge mechanism including an enclosure having first and second mounting ends, a docking port at each end configured and dimensioned to interface with a loadport of a semiconductor tool, and at least one wafer transport robot operable to transport a wafer between the docking ports. The wafer transport robot hands off or receives a wafer to/from a tool robot at the loadports of a first and second tool. The bridge mechanism allows one or more wafers to be transferred between loadports of different tools on an individual basis without reliance on the FAB's automated material handling system (AMHS) for bulk wafer transport inside a wafer carrier such as a FOUP or others.
Public/Granted literature
- US20130322990A1 LOADPORT BRIDGE FOR SEMICONDUCTOR FABRICATION TOOLS Public/Granted day:2013-12-05
Information query
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