Invention Grant
US08945367B2 Electrolytic apparatus, system and method for the safe production of nitrogen trifluoride 有权
用于安全生产三氟化氮的电解设备,系统和方法

Electrolytic apparatus, system and method for the safe production of nitrogen trifluoride
Abstract:
An electrolytic cell and system used for making nitrogen trifluoride consisting of a computer and an electrolytic cell having a body, an electrolyte, at least one anode chamber that produces an anode product gas, at least one cathode chamber, and one or more fluorine adjustment means to maintain fluorine or hydrogen in the anode product gas within a target amount by adjusting the concentration of fluorine in said anode product gas, and the process that controls the system.
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