Invention Grant
- Patent Title: Touchless site isolation using gas bearing
- Patent Title (中): 使用气体轴承进行无触点隔离
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Application No.: US13337374Application Date: 2011-12-27
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Publication No.: US08945407B2Publication Date: 2015-02-03
- Inventor: Aaron Francis
- Applicant: Aaron Francis
- Applicant Address: US CA San Jose
- Assignee: Intermolecular, Inc.
- Current Assignee: Intermolecular, Inc.
- Current Assignee Address: US CA San Jose
- Main IPC: H01L21/302
- IPC: H01L21/302 ; B08B3/04
Abstract:
A gas bearing seal using porous materials for distribution of gas flow can provide site isolation during wet processing. In some embodiments, a flow cell comprises a porous media gas bearing surrounding a periphery of the flow cell, isolating the liquid inside the flow cell from the ambient air outside the flow cell. In some embodiments, a protective chuck comprises a porous media gas bearing disposed in a middle of the protective chuck, isolating the liquid outside the protective chuck with the gaseous ambient generated by the porous media gas bearing.
Public/Granted literature
- US20130160858A1 TOUCHLESS SITE ISOLATION USING GAS BEARING Public/Granted day:2013-06-27
Information query
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