Invention Grant
US08945444B2 High throughput imprint based on contact line motion tracking control
有权
基于接触线运动跟踪控制的高吞吐量印记
- Patent Title: High throughput imprint based on contact line motion tracking control
- Patent Title (中): 基于接触线运动跟踪控制的高吞吐量印记
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Application No.: US12327618Application Date: 2008-12-03
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Publication No.: US08945444B2Publication Date: 2015-02-03
- Inventor: Xiaoming Lu , Philip D. Schumaker
- Applicant: Xiaoming Lu , Philip D. Schumaker
- Applicant Address: US TX Austin US TX Austin
- Assignee: Canon Nanotechnologies, Inc.,Molecular Imprints, Inc.
- Current Assignee: Canon Nanotechnologies, Inc.,Molecular Imprints, Inc.
- Current Assignee Address: US TX Austin US TX Austin
- Agent Cameron A. King
- Main IPC: B29C43/58
- IPC: B29C43/58 ; B29C43/00 ; B82Y10/00 ; G03F7/00 ; B82Y40/00 ; B29C43/02
Abstract:
Systems and methods for controlling velocity of a contact line and height profile between a template and a substrate during imprinting of polymerizable material are described.
Public/Granted literature
- US20090140445A1 High Throughput Imprint Based on Contact Line Motion Tracking Control Public/Granted day:2009-06-04
Information query
