Invention Grant
- Patent Title: Patterned, dense and high-quality SWNTs arrays
- Patent Title (中): 图案,密集和高质量的SWNT阵列
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Application No.: US12429595Application Date: 2009-04-24
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Publication No.: US08945502B2Publication Date: 2015-02-03
- Inventor: Peter J. Burke , Weiwei Zhou , Christopher M. Rutherglen
- Applicant: Peter J. Burke , Weiwei Zhou , Christopher M. Rutherglen
- Applicant Address: US CA Oakland
- Assignee: The Regents of the University of California
- Current Assignee: The Regents of the University of California
- Current Assignee Address: US CA Oakland
- Agency: One LLP
- Main IPC: D01F9/12
- IPC: D01F9/12 ; D01F9/127 ; H01L51/00 ; B82Y10/00 ; B82Y30/00 ; B82Y40/00 ; C01B31/02 ; H01L51/05

Abstract:
An electronics component is disclosed herein. The electronics component include a substrate and a plurality of single-walled carbon nanotubes (SWNTs) formed on said substrate, wherein said plurality of SWNTs form a patterned, dense and high-quality arrays of single-walled carbon nanotubes (SWNTs) on quartz wafers by using FeCl3/polymer as catalytic precursors and chemical vapor deposition (CVD) of methane. With the assistance of polymer, the catalysts may be well-patterned on the wafer surface by simple photolithography or polydimethylsiloxane (PDMS) stamp microcontact printing (μCP).
Public/Granted literature
- US20090286066A1 PATTERNED, DENSE AND HIGH-QUALITY SWNTS ARRAYS Public/Granted day:2009-11-19
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