Invention Grant
- Patent Title: Deposition apparatus, method for manufacturing organic light emitting display apparatus, and organic light emitting display apparatus
- Patent Title (中): 沉积装置，制造有机发光显示装置的方法和有机发光显示装置
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Application No.: US14040334Application Date: 2013-09-27
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Publication No.: US08945682B2Publication Date: 2015-02-03
- Inventor: Heung-Ki Hong
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR
- Agency: Innovation Counsel LLP
- Priority: KR10-2013-0056040 20130516
- Main IPC: B05B13/02
- IPC: B05B13/02 ; H01L51/56
Abstract:
A deposition apparatus includes a first transporting unit configured to transport moving units, to which substrates may be detachably affixed, in a first direction; and a second transporting unit configured to transport empty moving units, from which the respective substrates have been detached, in a return direction opposite to the first direction, wherein the moving units are transported cyclically in reusing fashion.
Public/Granted literature
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