Invention Grant
- Patent Title: Process for forming silver films on silicon
- Patent Title (中): 在硅上形成银膜的工艺
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Application No.: US13373484Application Date: 2011-11-14
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Publication No.: US08945794B2Publication Date: 2015-02-03
- Inventor: Faris Modawar , Jeff Miller , Mike Jura , Brian Murphy , Marcie Black , Brent A. Buchine
- Applicant: Faris Modawar , Jeff Miller , Mike Jura , Brian Murphy , Marcie Black , Brent A. Buchine
- Main IPC: H01M4/36
- IPC: H01M4/36 ; H01B13/00 ; H01L31/00 ; H01L21/308 ; H01L21/306 ; B82Y10/00
Abstract:
A process is provided for etching a silicon-containing substrate. In the process, the surface of the substrate is cleaned. A film of alumina is deposited on the cleaned substrate surface. A silver film is deposited above the film of alumina. An etchant comprising HF is contacted with the silver film.
Public/Granted literature
- US20120156585A1 Process for forming silver films on silicon Public/Granted day:2012-06-21
Information query
