Invention Grant
- Patent Title: Photosensitive imaging device and method for forming semiconductor device
- Patent Title (中): 感光成像装置及半导体装置的形成方法
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Application No.: US13836346Application Date: 2013-03-15
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Publication No.: US08945967B2Publication Date: 2015-02-03
- Inventor: Zhiwei Wang , Jianhong Mao , Fengqin Han , Lei Zhang , Deming Tang
- Applicant: Lexvu Opto Microelectronics Technology (Shanghai) Ltd
- Applicant Address: CN Shanghai
- Assignee: Lexvu Opto Microelectronics Technology (Shanghai) Ltd
- Current Assignee: Lexvu Opto Microelectronics Technology (Shanghai) Ltd
- Current Assignee Address: CN Shanghai
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: CN201210071907 20120316
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L31/02 ; H01L27/146

Abstract:
A photosensitive imaging device and a method for forming a semiconductor device are provided. The method includes: providing a first device layer formed on a first substrate, wherein a conductive top bonding pad layer is formed on the first device layer; providing a continuous second device layer formed on a second substrate, wherein a continuous conductive adhesion layer is formed on the continuous second device layer; bonding the first device layer with the second device layer, where the top bonding pad layer on the first device layer is directly connected with the conductive continuous adhesion layer on the continuous second device layer; removing the second substrate; selectively etching the continuous second device and the continuous conductive adhesion layer to form a groove array; and filling up the groove array with an insulation material to form a plurality of second devices. Alignment accuracy may be improved.
Public/Granted literature
- US20130240962A1 Photosensitive Imaging Device and Method for Forming Semiconductor Device Public/Granted day:2013-09-19
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