A method of manufacturing an organic light-emitting display device includes: fixing a substrate onto an electrostatic chuck; combining the electrostatic chuck with a chuck moving member; moving the electrostatic chuck along a guide member into a chamber by using the chuck moving member; and depositing an organic layer on the substrate while moving the substrate with respect to an organic layer deposition assembly arranged in the chamber, the chuck moving member being moved along the guide member by an association of a chain unit and a hook unit, and the substrate being spaced apart from the organic layer deposition assembly.