Invention Grant
- Patent Title: Organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus by using the same, and organic light-emitting display apparatus manufactured by the method
- Patent Title (中): 有机层沉积装置，使用该有机发光显示装置的方法和通过该方法制造的有机发光显示装置
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Application No.: US13797831Application Date: 2013-03-12
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Publication No.: US08945979B2Publication Date: 2015-02-03
- Inventor: Yun-Ho Chang
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: Christie, Parker & Hale, LLP
- Priority: KR10-2012-0126942 20121109
- Main IPC: H01L51/40
- IPC: H01L51/40 ; H01L51/56 ; C23C14/04 ; C23C14/24 ; C23C14/50 ; C23C14/54 ; C23C14/56 ; H01L27/32
Abstract:
An organic layer deposition apparatus, a method of manufacturing an organic light-emitting display apparatus by using the same, and an organic light-emitting display apparatus manufactured by the method, and more particularly, an organic layer deposition apparatus that is suitable for use in the mass production of a large substrate, that enables high-definition patterning, and that is capable of controlling a distance between a patterning slit sheet and a substrate that moves, a method of manufacturing an organic light-emitting display apparatus by using the organic layer deposition apparatus, and an organic light-emitting display apparatus manufactured by the method.
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