Invention Grant
US08945997B2 Integrated circuits having improved split-gate nonvolatile memory devices and methods for fabrication of same
有权
具有改进的分离式非易失性存储器件的集成电路及其制造方法
- Patent Title: Integrated circuits having improved split-gate nonvolatile memory devices and methods for fabrication of same
- Patent Title (中): 具有改进的分离式非易失性存储器件的集成电路及其制造方法
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Application No.: US13929393Application Date: 2013-06-27
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Publication No.: US08945997B2Publication Date: 2015-02-03
- Inventor: Zufa Zhang , Khee Yong Lim , Elgin Quek
- Applicant: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Current Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Current Assignee Address: SG Singapore
- Agency: Ingrassia Fisher & Lorenz, P.C.
- Main IPC: H01L21/82
- IPC: H01L21/82 ; H01L29/792 ; H01L29/66

Abstract:
Integrated circuits and methods for fabricating integrated circuits are provided. An exemplary method for fabricating an integrated circuit having a split-gate nonvolatile memory device includes forming a charge storage structure overlying a semiconductor substrate and having a first sidewall and a second sidewall and forming an interior cavity. The method forms a control gate in the interior cavity. Further, the method forms a first select gate overlying the semiconductor substrate and adjacent the first sidewall. A first memory cell is formed by the control gate and the first select gate. The method also forms a second select gate overlying the semiconductor substrate and adjacent the second sidewall. A second memory cell is formed by the control gate and the second select gate.
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