Invention Grant
US08945997B2 Integrated circuits having improved split-gate nonvolatile memory devices and methods for fabrication of same 有权
具有改进的分离式非易失性存储器件的集成电路及其制造方法

Integrated circuits having improved split-gate nonvolatile memory devices and methods for fabrication of same
Abstract:
Integrated circuits and methods for fabricating integrated circuits are provided. An exemplary method for fabricating an integrated circuit having a split-gate nonvolatile memory device includes forming a charge storage structure overlying a semiconductor substrate and having a first sidewall and a second sidewall and forming an interior cavity. The method forms a control gate in the interior cavity. Further, the method forms a first select gate overlying the semiconductor substrate and adjacent the first sidewall. A first memory cell is formed by the control gate and the first select gate. The method also forms a second select gate overlying the semiconductor substrate and adjacent the second sidewall. A second memory cell is formed by the control gate and the second select gate.
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