Invention Grant
US08946007B2 Inverted thin channel mosfet with self-aligned expanded source/drain
有权
反向薄沟道MOSFET,具有自对准扩展源极/漏极
- Patent Title: Inverted thin channel mosfet with self-aligned expanded source/drain
- Patent Title (中): 反向薄沟道MOSFET,具有自对准扩展源极/漏极
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Application No.: US13762044Application Date: 2013-02-07
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Publication No.: US08946007B2Publication Date: 2015-02-03
- Inventor: Bruce B. Doris , Kangguo Cheng , Ali Khakifirooz , Douglas C. La Tulipe, Jr.
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent H. Daniel Schnurmann
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L29/66 ; H01L21/74 ; H01L29/78 ; H01L27/12

Abstract:
After formation of a gate electrode, a source trench and a drain trench are formed down to an upper portion of a bottom semiconductor layer having a first semiconductor material of a semiconductor-on-insulator (SOI) substrate. The source trench and the drain trench are filled with at least a second semiconductor material that is different from the first semiconductor material to form source and drain regions. A planarized dielectric layer is formed and a handle substrate is attached over the source and drain regions. The bottom semiconductor layer is removed selective to the second semiconductor material, the buried insulator layer, and a shallow trench isolation structure. The removal of the bottom semiconductor layer exposes a horizontal surface of the buried insulator layer present between source and drain regions on which a conductive material layer is formed as a back gate electrode.
Public/Granted literature
- US20130302950A1 INVERTED THIN CHANNEL MOSFET WITH SELF-ALIGNED EXPANDED SOURCE/DRAIN Public/Granted day:2013-11-14
Information query
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