Invention Grant
- Patent Title: Merged FinFETs and method of manufacturing the same
- Patent Title (中): 合并FinFET及其制造方法
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Application No.: US12574296Application Date: 2009-10-06
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Publication No.: US08946028B2Publication Date: 2015-02-03
- Inventor: Kevin K. Chan , Zhibin Ren , Xinhui Wang , Keith Kwong Hon Wong
- Applicant: Kevin K. Chan , Zhibin Ren , Xinhui Wang , Keith Kwong Hon Wong
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Roberts Mlotkowski Safran & Cole, P.C.
- Agent Joseph Abate
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L29/417 ; H01L29/66 ; H01L29/78
Abstract:
FinFETs are merged together by a metal. The method of manufacturing the FinFETs include forming a plurality of fin bodies on a substrate and merging the fin bodies with a metal. The method further includes implanting source and drain regions through the metal.
Public/Granted literature
- US20110079855A1 MERGED FINFETS AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2011-04-07
Information query
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